深圳大学 物理与光电工程学院 光电子器件与系统(教育部/广东省)重点实验室,广东 深圳 518060
利用深反应离子刻蚀技术或湿法腐蚀在硅上制作光栅结构,将与光栅浸润的液体作为载体携带铋纳米颗粒进入光栅结构内,形成致密排列,从而制作出X射线吸收光栅.致密地填充了周期为42 μm、刻蚀深度为150 μm的光栅结构,比较了其与微铸造法制作的铋块体吸收光栅的X射线吸收性能,并通过填充周期为24 μm和6 μm的光栅结构,研究了光栅周期与填充致密性之间的关系.扫描电镜测试结果显示自由沉降法可有效制作较大周期光栅,但对周期为6 μm光栅结构填充的致密性不佳。分析结果表明,对于小周期吸收光栅,需筛选所用填充颗粒,以保证颗粒粒径远小于光栅槽宽.基于纳米颗粒的自由沉降法可降低光栅制作成本及技术门槛,方便实现大面积吸收光栅的制作.
X射线成像 吸收光栅 自由沉降 铋纳米颗粒 刻蚀 相位衬度 X-ray imaging Absorption gratings Free settling Bismuth nanoparticles Etching Phase contrast 光子学报
2019, 48(10): 1005001
Author Affiliations
Abstract
1 National Synchrotron Radiation Laboratory, University of Science and Technology of China, Hefei 230027, China
2 Hefei Meiya Optoelectronic Technology Inc., Hefei 230088, China
We design a new kind of phase zone plates (PZPs) to improve the diffraction efficiency of soft x ray zone plates (ZPs). The design replaces blank parts of PZPs with metals of negative phase shift at the working energy, which is called as the positive and negative PZPs (PNPZPs). According to the calculation, PNPZPs have a higher maximum efficiency than conventional ZPs with the same zone width. With the help of a negative phase coefficient, it is much easier to achieve a π phase shift in one period, resulting in a smaller zone height. This design can help fabricate finer PZPs to achieve a better image resolution.
050.1965 Diffractive lenses 050.1970 Diffractive optics Chinese Optics Letters
2017, 15(2): 020501
